Wafer production

Introdiction

The wafer production is splitted in two:

4-inch wafers with Pt RTDs and Al heaters, maskless, produced by FCBG at NMP
6-inch wafers with Al heaters, with Cr mask, produced by us at CMi.

Inventory

6-inch

We have started with 23 wafers in total, from a batch of 25 (two got brokem at the supplier).
20 wafers were coated by the supplier with 100 Å ±10% / 10,000 Å ±10% Ti / Al (sputtered).
The list below is the wafer thickness measured by the supplier after coating.
The wafers were delivered on a cassette with the same order as the list below.

The following list shows the status of each wafer.

Wafer	Where it is	Production step	Batch - Date	Comments
1	CMi	Ti/Al coated
2	CMi	Ti/Al coated
3	CMi	Ti/Al coated
4	CMi	Ti/Al coated
5	CMi	Ti/Al coated
6	CMi	Ti/Al coated
7	CMi	Ti/Al coated
8	CMi	Ti/Al coated
9	CMi	Ti/Al coated
10	CMi	Ti/Al coated
11	CMi	Ti/Al coated
12	CMi	Ti/Al coated
13	CMi	Ti/Al coated
14	CMi	Ti/Al coated
15	UNIGE	Ready for dicing	#3 - 01/2024	V2 mask
16	UNIGE	Ready for dicing	#3 - 03/2024	V2 mask
17	UNIGE	Ready for dicing	#2 - 02/2024	V2 mask
18	UNIGE	Ready for dicing	#1 - 01/2024	Wrong mask, used for setup
19	UNIGE	Ready for dicing	#1 - 01/2024	Wrong mask, used for setup - With Mateus
20	UNIGE	Diced	#1 - 01/2024	Wrong mask, used for setup

The remaining 3 wafers, delivered on a second cassette, also had their thickness measured.

Wafer	Where it is	Production step
21	UNIGE	Bare silicon
22	UNIGE	Bare silicon
23	UNIGE	Bare silicon

The list below tracks where the diced chips are.

Wafer #01

|   Chip   |   Where it is   |   Gold stud bumped?   |   Comments   |
|:-----:|:------------:|:------------------:|:--------------------------:|
|  A2   | UNIGE        | No                 |                            |
|  A3   | UNIGE        | No                 |                            |
|  A4   | UNIGE        | No                 |                            |
|  B1   | UNIGE        | No                 |                            |
|  B2   | UNIGE        | No                 |                            |
|  B3   | UNIGE        | No                 |                            |
|  B4   | UNIGE        | No                 |                            |
|  B5   | UNIGE        | No                 |  With Franck for jig testing  |
|  C1   | UNIGE        | No                 |                            |
|  C2   | UNIGE        | No                 |                            |
|  C3   | UNIGE        | No                 |                            |
|  C4   | UNIGE        | No                 |  With Franck for jig testing  |
|  C5   | UNIGE        | No                 |  With Franck for jig testing  |
|  D2   | UNIGE        | No                 |                            |
|  D3   | UNIGE        | No                 |                            |
|  D4   | UNIGE        | No                 |  With Franck for jig testing  |

4-inch

25 4-inch wafers were made available by Didier. The following table list their thickness

Wafer	Thickness [um]
1	285
2	288
3	307
4	316
5	320
6	313
7	323
8	307
9	323
10	286
11	275
12	281
13	313
14	302
15	320
16	318
17	285
18	283
19	305
20	322
21	290
22	307
23	290
24	290
25	309

Wafer	Thickness [um]
1	285
2	288
3	307
4	316
5	320
6	313
7	323
8	307
9	323
10	286
11	275
12	281
13	313
14	302
15	320
16	318
17	285
18	283
19	305
20	322
21	290
22	307
23	290
24	290
25	309

Wafer	Thickness [um]
1	285
2	288
3	307
4	316
5	320
6	313
7	323
8	307
9	323
10	286
11	275
12	281
13	313
14	302
15	320
16	318
17	285
18	283
19	305
20	322
21	290
22	307
23	290
24	290
25	309

Wafer	Thickness [um]
1	285
2	288
3	307
4	316
5	320
6	313
7	323
8	307
9	323
10	286
11	275
12	281
13	313
14	302
15	320
16	318
17	285
18	283
19	305
20	322
21	290
22	307
23	290
24	290
25	309